Ti si target Ti Si alloy target vacuum sputtering ti si targ
Titanium silicon targetproduct details
(1) Product features: the product has the characteristics of high purity.
(2) Product application: various targets
(3) Common specification granularity: as shown in the figure below or according to customer demand.
(4) Chemical composition and physical index (as shown below)
(5) Product executive standard:
|
name |
Ingredients（at%) |
Purity |
Size |
Density |
制造方法 |
|
Planar target |
TiSi 85/15 80/20 75/25 |
99.8% |
<120µm |
99.8% |
HIp |
|
Rotating target |
TiSi 85/15 80/20 75/25 |
99.8% |
<120µm |
99.8% |
HIP |
|
Specification / size |
Φ160*12 Φ128*15 Φ105*16 Φ100*32 Φ64*32 741*191*18 1040*191*18 1701*132*12 矩形靶材最长可达1800mm，圆形靶材直径可达350mm |
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